PRODUCT NAME |
Mask Alinger For Education
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ABSTRACT |
The Mask Aligner for Education and Research is an integrated optical-mechanical, low-cost contact type system which allows X,Y,Z stage accurate alignment of sensitized semiconductor wafers with a mask and exposes them to ultraviolet radiation. This equipment equipped with all standard features for education purpose and low scale laboratory usage.
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FILING COUNTRY |
Malaysia
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REG. NUMBER |
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INTELLECTUAL STATUS |
Novel
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FILE DATE |
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IP TYPE |
Patent
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YEAR APPLY |
2011
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DEPARTMENT |
INSTITUT KEJURUTERAAN NANO ELEKTRONIK
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STAF NO / MATRIC NO |
UDA BIN HASHIM, 640330-02-5389, 0402428
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OWNER NAME |
UNIMAP
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EQUITY PERCENTAGE |
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NOTEL HP |
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