PRODUCT NAME | Method of Fabrication of a Piezoelectric Based Micro-Cantilever for use in Sensing Applications |
FILING COUNTRY | Malaysia |
REG. NUMBER | PI 2016701708 |
INTELLECTUAL STATUS | Patent Filing |
FILE DATE | 12/5/2016 |
IP TYPE | Patent |
YEAR APPLY | 2016 |
DEPARTMENT | PUSAT PENGAJIAN KEJURUTERAAN MIKROELEKTRONIK |