| PRODUCT NAME |
A Method To Manufacture A Nanowire Biosensor
|
| ABSTRACT |
A method of fabricating a nanowire biosensor having at least one nanowire between a pair of source and drain electrodes on a silicon substrate comprising the steps of etching the silicon substrate patterned by an electron beam lithography process to form at least one nanowire on the surface of the substrate,applying a layer of Aurum on top surface of the substrate, subjecting the substrate to an optical lithography process for patternig a pair of source and drain electrodes on top of the formed nanomire and etching off rest of the non-patterned Aurum layer to form a pair of source and drain electrodes connected by the nanowire.
|
| FILING COUNTRY |
Malaysia
|
| REG. NUMBER |
PI 2011003054
|
| INTELLECTUAL STATUS |
Patent Pending / Filing - Modified Subtantive Examination
|
| FILE DATE |
29/6/2011
|
| IP TYPE |
Patent
|
| YEAR APPLY |
2011
|
| DEPARTMENT |
INSTITUT KEJURUTERAAN NANO ELEKTRONIK
|
