PRODUCT NAME Mask Alinger For Education
ABSTRACT The Mask Aligner for Education and Research is an integrated optical-mechanical, low-cost contact type system which allows X,Y,Z stage accurate alignment of sensitized semiconductor wafers with a mask and exposes them to ultraviolet radiation. This equipment equipped with all standard features for education purpose and low scale laboratory usage.
FILING COUNTRY Malaysia
REG. NUMBER
INTELLECTUAL STATUS Novel
FILE DATE
IP TYPE Patent
YEAR APPLY 2011
DEPARTMENT INSTITUT KEJURUTERAAN NANO ELEKTRONIK