PRODUCT NAME Automated Silicon Wet Etch System
ABSTRACT This Product Will Assist the development of fabrication field in terms of wet etch process. The complete system replaced the manual wafer thinning in automated wafer thinning process by additional of components such as light density detector and motor controller. As compared to other product, high efficiency system will achieved due to continuous monitoring of wafer thickness between sample and integrated sensors in the system. Thus the final-end quality of sample will be improved.
FILING COUNTRY Malaysia
REG. NUMBER
INTELLECTUAL STATUS Novel
FILE DATE 20/3/2015
IP TYPE Patent
YEAR APPLY 2015
DEPARTMENT PUSAT PENGAJIAN KEJURUTERAAN MIKROELEKTRONIK