| ABSTRACT |
Present invention discloses a method for fabricating optical waveguides by depositing a 5 nanophotonic material on a semiconductors substrates. The invention further discloses a process for preparing nanophotonic lithium niobate (LiNbO3) on semiconductors substrates, for fabricating optical waveguides. The method involves the steps of dissolving, the Li2CO3, Nb2O5 and citric acid in ethylene glycol with heating and stirring at 90 °C for 8 h, and then mixing all together with continue heating and stirring at 90 °C for 8 h. To 10 obtain homogeneous and crack-free films of LiNbO3, the precursor was deposited by spin-coating technique on quartz substrates at a spinning speed of 3000 rpm for 30 s. Seven layers were prepared, and the film was dried at 120 °C for 10 min and was annealed (calcined) at 500 °C for 2 h in static air and oxygen atmosphere to remove the organics. The invention is aimed to increase the data transferring efficiency of an optical waveguides 15 film which is highly pure and have very good optical, structural and morphological properties. The optical waveguides have high refractive index, and is economical, have nanobiosensor application, reduces energy consumption, combat poverty, keep our environment clean and green in different fields of our life.
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