PRODUCT NAME Mask Alinger For Education
ABSTRACT A bench top mask aligner system for photolithography is provided. The system includes a substrate holder to hold a substrate, a mask holder to hold a photomask in place, a wafer holder to hold the wafer placed through the mask holder, a mask aligner system to align the photomask and the wafer, and an exposure time control panel to coontrol and set exposure time for the mask aligment system.
FILING COUNTRY Malaysia
REG. NUMBER PI 2012004670
INTELLECTUAL STATUS Patent Pending / Filing - Substantive Examination
FILE DATE 19/10/2012
IP TYPE Patent
YEAR APPLY 2012
DEPARTMENT INSTITUT KEJURUTERAAN NANO ELEKTRONIK
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